Case background: "Thousand-hole problem" in chip manufacturing
In the field of semiconductor chip processing, quartz glass is widely used in the manufacture of spray disks in the etching process due to its high purity, high temperature resistance and chemical stability. The processing requirements of a leading chip equipment manufacturer for quartz spray disks are very representative:
Material: Quartz glass (hardness HV700)
Core features: 0.5mm diameter, 5mm deep micro-holes (depth-to-diameter ratio 10:1), 4,996 holes need to be evenly processed on a disk with a diameter of 280mm
Precision requirements: Hole roundness ≤±5μm, position error <0.02mm, hole edge collapse ≤0.15mm
The manufacturer originally used traditional drilling technology, but faced two fatal problems:
Efficiency bottleneck: Single hole processing takes 270 seconds, and single disk processing requires continuous operation for 34 days;
Yield out of control: The hole edge collapse reaches 0.4mm, resulting in more than 30% of the workpieces being cracked and scrapped due to stress concentration.
MID Solutions: Ultrasonic technology subverts traditional crafts
In view of the brittle and hard characteristics of quartz glass, the MID R&D team proposed the ultrasonic precision engraving and milling system, which broke through three technical innovations:
① High-frequency ultrasonic vibration reduction technology
20kHz ultrasonic vibration shortens the contact time between the drill bit and the material to microseconds, reduces the cutting force by 65%, and suppresses the edge collapse from the root.
② Integral PCD drill customization
The drill bit is made of diamond composite sheet (PCD) in one piece, with a cutting edge arc accuracy of ±2μm, and a 0.01° axial correction system to ensure the straightness of 5mm deep holes.
③ Vacuum adsorption positioning tooling
The air floating platform with independent control of multiple areas stabilizes the flatness error of the 280mm quartz disk within 0.005mm, eliminating the deviation of the drilling position.
Processing data comparison: double leap in efficiency and accuracy
The solution has been verified by customers in mass production for three consecutive months, and the yield of the spray plate has increased from 67% to 98%, saving manufacturers more than 8 million yuan in quartz material loss costs each year.
Industry Inspiration: The Technical Turning Point of Precision Machining
Quartz glass micro-hole processing was once a "bottleneck" link that restricted the upgrade of chip equipment. Through the engineering application of ultrasonic technology, MID not only solved the problem of micro-hole processing with a depth-to-diameter ratio of 10:1, but also verified a new paradigm for precision machining of brittle and hard materials - Replacing the simple increase in tool hardness with high-frequency vibration control, which has universal value for ultra-precision machining in industries such as ceramics and optical glass.
About Mid Precision
Mid Precision focuses on high-precision metal parts manufacturing. Relying on a 7,500 square meter modern production base, it provides one-stop solutions for complex structural parts in the fields of aerospace, medical machinery and robotics. The company takes "extreme precision and reliable delivery" as its core competitiveness, and has the ability to provide full-process services from material modification, multi-axis linkage processing to micron-level testing. It holds ISO 13485 medical device quality management system, AS9100 aerospace certification and other qualifications, and has delivered more than 200,000 key parts in total, helping customers break through the boundaries of precision manufacturing.
