Case study: Breakthrough in quartz glass substrate processing
Processing object: quartz glass substrate for photolithography
Specifications:
Material: 99.99% high-purity quartz glass
Processing features: double-sided C0.2 chamfer + vertical side wall
Surface requirements: Ra < 150nm (mirror grade)
Dimensions: 145×145×5.5mm±0.01mm
Analysis of industry processing pain points
As the core consumables of semiconductor manufacturing equipment, quartz parts for photolithography need to meet three strict standards at the same time: material transmittance > 99.6%, dimensional tolerance ±10μm, and side wall roughness Ra < 150nm. The traditional processing method uses grinding wheel grinding process, which has two major industry problems:
Efficiency bottleneck: single-piece processing takes up to 120 minutes
Surface defects: residual grinding wheel pattern leads to Ra value>560nm
Tool loss: ordinary tool life is less than 50 pieces
MID solutions technology innovation
In view of the hard and brittle characteristics of quartz materials, a composite processing solution is adopted:
• 20kHz ultrasonic precision engraving and milling system
• Integral PCD micro-blade milling cutter (edge R0.05mm)
• Axial layered cutting process (2μm per layer)
Comparison of measured processing advantages
Through process verification and comparison, key indicators have been significantly improved:
Industry Application Value
This solution successfully solved the "bottleneck" processing problem in the localization process of lithography machine parts, increasing the quartz substrate production capacity from 10 pieces per day to 50 pieces, and the processing qualification rate from 63% to 98.5%. According to the detection of Zeiss laser interferometer, the processing surface accuracy PV value is <λ/10 (λ=632.8nm), which meets the qualified assembly standards of optical components.
About MID
Mid Precision specializes in precision hardware parts processing, with 7,500 square meters of standardized workshops, and its services cover aerospace, medical equipment, industrial robots and other fields. With the ability to process complex structural parts and ISO system certification, it provides customers with full-process solutions from design and development to mass production.
