Analysis of processing object
Material: optical grade quartz glass
Processing features: multi-surface contour grinding (including 3 asymmetric facets)
Key dimensions: 16×16×10mm (error ±0.002mm)
This quartz prism, which is only the size of a fingernail, is the core light-guiding element of the optical system of a domestic high-end lithography machine. Its 8 complex curved surfaces need to achieve 99.6% transmittance and nanometer-level refractive accuracy, and the surface roughness directly affects the exposure resolution of the lithography machine.
Industry pain points and technical difficulties
An optical technology company encountered a bottleneck in quartz prism processing when promoting the localization of lithography machines:
Traditional grinding defects: The roughness after manual polishing still reaches Sa 120nm, resulting in 15% light scattering loss
Equipment dependence on imports: The cost of a single Japanese ultra-precision grinder exceeds 20 million yuan, and the delivery period is as long as 18 months
Yield crisis: Only 32 of the first batch of 500 trial productions met the standards, seriously dragging down the project progress
The dilemma of "cannot afford imported equipment, and domestic processes are not good" directly blocked the process of independent lithography machine development.
MID solutions' solution
In response to the extreme precision requirements of optical components, the MID technical team has developed innovative research and development:
1. Ultrasonic vertical five-axis linkage processing system
2. 0.1μm-level dynamic compensation, precise control of 18-axis linkage machine tools
3. Matching asymmetric surface CAD/CAM intelligent programming
4. High-frequency ultrasonic assisted grinding technology
5. 40kHz ultrasonic vibration reduces 52% of cutting stress and avoids quartz microcracks
6. Diamond micro-powder grinding wheel life is extended by 3 times
Actual measured performance leap
Three major breakthroughs have been achieved in the mass production of a certain type of domestic lithography machine prism:
1.Surface quality: Roughness Sa<70nm (better than ASML supplier standard)
2.Processing efficiency: Single-piece working hours are compressed from 14 hours to 3.5 hours
3.Cost control: Equipment investment is only 1/5 of the imported solution
The yield rate of the first batch of 3,000 products jumped to 98.7%, helping customers complete the assembly of prototypes 6 months ahead of schedule
About MID
MID Precision Technology (founded in 2017) focuses on breaking through the "bottleneck" technology in the field of high-end manufacturing. It has built a 7,500 square meter digital factory in Dongguan, equipped with imported equipment clusters such as five-axis linkage machining centers and ultra-precision optical grinders. By applying innovative technologies such as ultrasonic machining and cryogenic cutting to semiconductor equipment, optoelectronic instruments and other fields, it has provided key parts processing solutions for more than 20 domestic lithography machine industry chain companies, and has delivered more than 500,000 precision optical components.
