Processing case: Aluminum alloy 6061 spray plate depth-diameter ratio micro-hole processing
A chip equipment manufacturer needs to mass-produce aluminum alloy spray plates for cooling systems in chip manufacturing. The workpiece is an aluminum plate with a diameter of 300-600mm, and 5,000-20,000 through holes need to be processed, with a hole diameter of D0.7±0.015mm, a depth-diameter ratio of 28.6:1, and a hole wall roughness requirement of Ra<0.5μm. This requirement involves the dual challenges of high-precision hole wall finish processing and batch micro-hole processing stability.
Difficulties in traditional processing
Extreme depth-diameter ratio drilling is prone to deflection: the hole diameter is only 0.7mm and the depth is 20mm, and conventional drill bits are prone to breakage or offset;
It is difficult to meet the hole wall roughness standard: the sticking characteristics of aluminum alloy cause scratches and burrs on the hole wall, and the measured roughness Ra>0.6μm;
Processing efficiency and consistency are contradictory: the tool wears quickly during batch processing, the tolerance is easily exceeded, and the machine is frequently stopped for tool change.
MID Solutions: Ultrasonic precision engraving and milling technology achieves breakthrough
In response to the chip industry's demand for precision drilling of aluminum alloy spray plates, MID adopts an ultrasonic precision engraving and milling processing solution. The core technological innovations include:
High-frequency ultrasonic vibration system
The tool vibrates axially at a frequency of 20kHz, reducing the cutting resistance of aluminum alloy by 45% and avoiding scratches on the hole wall caused by sticking;
Combined with the depth-to-diameter ratio micro-hole processing technology, 28.6:1 deep holes are formed in one go, with a deflection of <0.01mm.
Nano-level cutting edge customized tool
Using ultra-hard coated tungsten steel drill bits, the cutting edge accuracy is ±1μm, which is suitable for the strict tolerance of D0.7mm aperture;
The internal cooling channel design is combined with micro-lubrication (MQL) to reduce cutting heat accumulation and extend the tool life by 3 times.
Intelligent processing parameter optimization
Dynamically adjust the speed and feed according to the aperture and depth to ensure the stability of continuous processing of more than 5,000 holes;
The real-time monitoring system warns of tool wear to avoid the risk of batch processing out-of-tolerance.
Processing effect: from Ra 0.6μm to Ra 0.342μm
After applying the MID solution, the spray plate micro-hole processing achieved:
Aperture consistency: 100% meets the tolerance of D0.7±0.015mm, CPK≥1.67;
Surface finish upgrade: The average roughness of the hole wall is Ra 0.342μm, which is 32% better than the customer's requirements;
Efficiency improvement: The daily production capacity of a single machine reaches 8,000 holes, which is 40% faster than the traditional solution.
This achievement significantly reduces the failure rate of the chip cooling system and reduces the cost of post-process polishing, becoming a benchmark case for micro-hole processing in chip manufacturing.
